Premium accurate AFM for failure analysis and quality assurance

NX20 from Park Systems

Park NX20, with its reputation as the world’s most accurate large sample AFM, is rated highly in the semiconductor and hard disk industry for its data accuracy.



2D flexure-guided scanner with 100 μm x 100 μm Scan range
High speed Z scanner with 15 μm scan range
Low noise XYZ position sensors
Motorized XY sample stage with optional encoders
Step-and-scan automation

More powerful failure analysis solutions
Park NX20 is equipped with unique features that make it easier to uncover the reasons behind device failure and develop more creative solutions. Its unparalleled precision provides high resolution data that lets you focus on your work, while its true non-contact mode scan keeps tips sharper and longer, so you won’t have to waste as much time and money replacing them.

Park also offer the NX20 300mm which was designed for optimal measurements of large samples. The entire 300 mm wafer area can be analyzed for low-noise AFM measurements. This opens up a whole new scope of measurement automation, allowing engineers to work faster, more simply, and with greater precision.

Surface roughness
Solar cells
Electricial characterization
Mechanical characterization
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